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Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride

This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC [Formula: see text] N [Formula: see text]) films with different atomic ratios via molecular dynamics simulation. The Si-C-N ternary amorphous model is constructed using ReaxFF potential and melt-quenching metho...

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Detalles Bibliográficos
Autores principales:	Ji, Chaoyue, Cai, Xintian, Zhou, Zhen, Gao, Bing, Liu, Sheng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572164/ https://www.ncbi.nlm.nih.gov/pubmed/36234206 http://dx.doi.org/10.3390/ma15196865

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