High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, t...

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Detalles Bibliográficos
Autores principales: Hu, Yuxuan, Dong, Bo, Lei, Liang, Wang, Zhizhong, Ruan, Shuangchen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572972/
https://www.ncbi.nlm.nih.gov/pubmed/36236537
http://dx.doi.org/10.3390/s22197439

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572972/
https://www.ncbi.nlm.nih.gov/pubmed/36236537
http://dx.doi.org/10.3390/s22197439

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