Complementary Adsorption of Binary Levelers for Highly Uniform Cu Micropillars

[Image: see text] Highly uniform Cu micropillars were electrodeposited on a Cu seed layer in a micropatterned photoresist in the presence of binary levelers containing pyrrolidine and pyridine functional groups. The adsorption behaviors of binary levelers, i.e., 3-hydroxy-6-(tert-butyl)pyridine and...

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Detalles Bibliográficos
Autores principales: Jo, Yugeun, Kim, Sung-Min, Jin, SangHoon, Lee, Woon Young, Lee, Sang-Yul, Lee, Min Hyung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9583340/
https://www.ncbi.nlm.nih.gov/pubmed/36278072
http://dx.doi.org/10.1021/acsomega.2c05646

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9583340/
https://www.ncbi.nlm.nih.gov/pubmed/36278072
http://dx.doi.org/10.1021/acsomega.2c05646

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