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Complementary Adsorption of Binary Levelers for Highly Uniform Cu Micropillars
[Image: see text] Highly uniform Cu micropillars were electrodeposited on a Cu seed layer in a micropatterned photoresist in the presence of binary levelers containing pyrrolidine and pyridine functional groups. The adsorption behaviors of binary levelers, i.e., 3-hydroxy-6-(tert-butyl)pyridine and...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9583340/ https://www.ncbi.nlm.nih.gov/pubmed/36278072 http://dx.doi.org/10.1021/acsomega.2c05646 |