Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

The high demand for pressure devices with miniaturization and a wide bearing range has encouraged researchers to explore new high-performance sensors from different approaches. In this study, a sensitive element based on graphene in-plane compression properties for realizing pressure sensing is expe...

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Detalles Bibliográficos
Autores principales: Liu, Daosen, Wei, Shengsheng, Wang, Dejun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9606897/
https://www.ncbi.nlm.nih.gov/pubmed/36298432
http://dx.doi.org/10.3390/s22208082

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9606897/
https://www.ncbi.nlm.nih.gov/pubmed/36298432
http://dx.doi.org/10.3390/s22208082

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