Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyros...

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Detalles Bibliográficos
Autores principales: Ranji, Ahmad Rahbar, Damodaran, Vijayakanthan, Li, Kevin, Chen, Zilang, Alirezaee, Shahpour, Ahamed, Mohammed Jalal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607085/
https://www.ncbi.nlm.nih.gov/pubmed/36296029
http://dx.doi.org/10.3390/mi13101676

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607085/
https://www.ncbi.nlm.nih.gov/pubmed/36296029
http://dx.doi.org/10.3390/mi13101676

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