Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor

Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for...

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Detalles Bibliográficos
Autores principales: Du, Guizhen, Dong, Xianshan, Huang, Xinglong, Su, Wei, Zhang, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607269/
https://www.ncbi.nlm.nih.gov/pubmed/36296066
http://dx.doi.org/10.3390/mi13101713

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607269/
https://www.ncbi.nlm.nih.gov/pubmed/36296066
http://dx.doi.org/10.3390/mi13101713

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