Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and in...

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Detalles Bibliográficos
Autores principales: Li, Yongtao, Wang, Yi, Li, Hanyan, Jiang, Bai, Bai, Fan, Feng, Jinjun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607413/
https://www.ncbi.nlm.nih.gov/pubmed/36295954
http://dx.doi.org/10.3390/mi13101601

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607413/
https://www.ncbi.nlm.nih.gov/pubmed/36295954
http://dx.doi.org/10.3390/mi13101601

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