Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance. This paper introduces the principle of an in-plane vibration micromechanical resonant accelerometer with electrostatic...

Descripción completa

Detalles Bibliográficos
Autores principales: Liu, Heng, Wu, Jiale, Zhang, Yu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607637/
https://www.ncbi.nlm.nih.gov/pubmed/36295965
http://dx.doi.org/10.3390/mi13101612

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607637/
https://www.ncbi.nlm.nih.gov/pubmed/36295965
http://dx.doi.org/10.3390/mi13101612

Ejemplares similares