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Comparative Study of Gravimetric Humidity Sensor Platforms Based on CMUT and QCM
Humidity sensors with comprehensive performance are of great interest for industrial and environmental applications. Most sensors, however, have to compromise on at least one characteristic such as sensitivity, response speed, and linearity. This paper reports a gravimetric humidity sensor based on...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608083/ https://www.ncbi.nlm.nih.gov/pubmed/36296004 http://dx.doi.org/10.3390/mi13101651 |