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Comparative Study of Gravimetric Humidity Sensor Platforms Based on CMUT and QCM

Humidity sensors with comprehensive performance are of great interest for industrial and environmental applications. Most sensors, however, have to compromise on at least one characteristic such as sensitivity, response speed, and linearity. This paper reports a gravimetric humidity sensor based on...

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Detalles Bibliográficos
Autores principales: Zheng, Zhou, Zhang, Guodong, Wang, Xiaomin, Kong, Xu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608083/
https://www.ncbi.nlm.nih.gov/pubmed/36296004
http://dx.doi.org/10.3390/mi13101651