Influence of reactive oxygen species concentration and ambient temperature on the evolution of chemical bonds during plasma cleaning: a molecular dynamics simulation

The research on plasma chemistry involved in the formation and dissociation of abundant chemical bonds is fundamental to developing plasma cleaning. To understand the influence of reactive oxygen species' concentration and ambient temperature on the evolution behavior of the chemical bond durin...

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Detalles Bibliográficos
Autores principales: Li, Yuhai, Jiang, Yilan, Liu, Xujie, Bai, Qingshun, Liu, Hao, Wang, Jingxuan, Zhang, Peng, Lu, Lihua, Yuan, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608119/
https://www.ncbi.nlm.nih.gov/pubmed/36349159
http://dx.doi.org/10.1039/d2ra05901k

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608119/
https://www.ncbi.nlm.nih.gov/pubmed/36349159
http://dx.doi.org/10.1039/d2ra05901k

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