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Fabrication of Multilayer Molds by Dry Film Photoresist
Dry film photoresists are widely employed to fabricate high-aspect-ratio microstructures, such as molds for microfluidic devices. Unlike liquid resists, such as SU-8, dry films do not require a cleanroom facility, and it is straightforward to prepare uniform and reproducible films as thick as 500 µm...
Autores principales: | Koucherian, Narek E., Yan, Shijun, Hui, Elliot E. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608710/ https://www.ncbi.nlm.nih.gov/pubmed/36295936 http://dx.doi.org/10.3390/mi13101583 |
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