Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic response is obtained by the averaging method....

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Detalles Bibliográficos
Autores principales: Zhang, Lijuan, Zhang, Huabiao, Li, Xinye, Ji, Yunxiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609132/
https://www.ncbi.nlm.nih.gov/pubmed/36295922
http://dx.doi.org/10.3390/mi13101569

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609132/
https://www.ncbi.nlm.nih.gov/pubmed/36295922
http://dx.doi.org/10.3390/mi13101569

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