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Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope
The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic response is obtained by the averaging method....
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609132/ https://www.ncbi.nlm.nih.gov/pubmed/36295922 http://dx.doi.org/10.3390/mi13101569 |