Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal

Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for...

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Detalles Bibliográficos
Autores principales: Li, Lixia, Zhu, Chuang, Liu, Haixia, Li, Yan, Wang, Qi, Su, Kun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609283/
https://www.ncbi.nlm.nih.gov/pubmed/36298102
http://dx.doi.org/10.3390/s22207751

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609283/
https://www.ncbi.nlm.nih.gov/pubmed/36298102
http://dx.doi.org/10.3390/s22207751

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