A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm(2). The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theo...

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Detalles Bibliográficos
Autores principales: Yang, Chaoxiang, Hu, Bohao, Lu, Liangyu, Wang, Zekai, Liu, Wenjuan, Sun, Chengliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611417/
https://www.ncbi.nlm.nih.gov/pubmed/36295961
http://dx.doi.org/10.3390/mi13101608

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611417/
https://www.ncbi.nlm.nih.gov/pubmed/36295961
http://dx.doi.org/10.3390/mi13101608

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