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A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm(2). The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theo...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611417/ https://www.ncbi.nlm.nih.gov/pubmed/36295961 http://dx.doi.org/10.3390/mi13101608 |