Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiN(x)/La:HfO(2)/TiN(x) Stacks Grown by PEALD on SiO(2)/Si

This work reports experimental results of the quantitative determination of oxygen and band gap measurement in the TiN(x) electrodes in planar TiN(x) top/La:HfO(2)/TiN(x) bottom MIM stacks obtained by plasma enhanced atomic layer deposition on SiO(2). Methodological aspects of extracting structural...

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Detalles Bibliográficos
Autores principales: Suvorova, Elena I., Uvarov, Oleg V., Chizh, Kirill V., Klimenko, Alexey A., Buffat, Philippe A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611760/
https://www.ncbi.nlm.nih.gov/pubmed/36296797
http://dx.doi.org/10.3390/nano12203608

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611760/
https://www.ncbi.nlm.nih.gov/pubmed/36296797
http://dx.doi.org/10.3390/nano12203608

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