An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring

In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using...

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Detalles Bibliográficos
Autores principales: Zhang, Lan, Lu, Jian, Takagi, Hideki, Matsumoto, Sohei, Higurashi, Eiji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611872/
https://www.ncbi.nlm.nih.gov/pubmed/36296039
http://dx.doi.org/10.3390/mi13101686

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611872/
https://www.ncbi.nlm.nih.gov/pubmed/36296039
http://dx.doi.org/10.3390/mi13101686

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