An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring

In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using only four photomasks and the proposed sensor had an ultra-compact fabricated size (<2.2 × 2.2 mm(2)). A vacuum measurement system was set up to comprehensively evaluate the fabricated sensors. The results demonstrated that the MEMS Pirani vacuum sensor has a high responsivity in the low-pressure domain from 100 Pa. The proposed sensor with a 953.0-Ω heater exhibited an average responsivity of 11.9 mV/Pa in the preferred range of 100 to 7 Pa and 96.0 mV/Pa in the range of 7 to 1 Pa. The sensor may be potentially suitable in many applications, such as vacuum indicators for processing equipment, health monitoring systems for social infrastructure, and medical and health applications.