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An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611872/ https://www.ncbi.nlm.nih.gov/pubmed/36296039 http://dx.doi.org/10.3390/mi13101686 |