Focus movement distance per pulse dependence of electrical conductivity and diameter of diamond internal modification induced by picosecond laser

Internal and local modifications via ultrashort pulsed laser illumination to diamond are promising for manufacturing diamond electronic devices. The relationship between the diameter/electrical conductivity of modified regions and the laser fluence distribution was investigated. Picosecond laser ill...

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Detalles Bibliográficos
Autores principales: Tokunaga, Daijiro, Sato, Masataka, Itoh, Sho, Hidai, Hirofumi, Omatsu, Takashige, Matsusaka, Souta
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9622841/
https://www.ncbi.nlm.nih.gov/pubmed/36316346
http://dx.doi.org/10.1038/s41598-022-21432-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9622841/
https://www.ncbi.nlm.nih.gov/pubmed/36316346
http://dx.doi.org/10.1038/s41598-022-21432-9

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