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Focus movement distance per pulse dependence of electrical conductivity and diameter of diamond internal modification induced by picosecond laser
Internal and local modifications via ultrashort pulsed laser illumination to diamond are promising for manufacturing diamond electronic devices. The relationship between the diameter/electrical conductivity of modified regions and the laser fluence distribution was investigated. Picosecond laser ill...
Autores principales: | Tokunaga, Daijiro, Sato, Masataka, Itoh, Sho, Hidai, Hirofumi, Omatsu, Takashige, Matsusaka, Souta |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9622841/ https://www.ncbi.nlm.nih.gov/pubmed/36316346 http://dx.doi.org/10.1038/s41598-022-21432-9 |
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