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Mixed-Substituted Single-Source Precursors for Si(1–x)Ge(x) Thin Film Deposition
[Image: see text] A series of new mixed-substituted heteronuclear precursors with preformed Si–Ge bonds has been synthesized via a two-step synthesis protocol. The molecular sources combine convenient handling with sufficient thermal lability to provide access to group IV alloys with low carbon cont...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9627566/ https://www.ncbi.nlm.nih.gov/pubmed/36260357 http://dx.doi.org/10.1021/acs.inorgchem.2c02835 |