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Mixed-Substituted Single-Source Precursors for Si(1–x)Ge(x) Thin Film Deposition

[Image: see text] A series of new mixed-substituted heteronuclear precursors with preformed Si–Ge bonds has been synthesized via a two-step synthesis protocol. The molecular sources combine convenient handling with sufficient thermal lability to provide access to group IV alloys with low carbon cont...

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Detalles Bibliográficos
Autores principales:	Köstler, Benedikt, Jungwirth, Felix, Achenbach, Luisa, Sistani, Masiar, Bolte, Michael, Lerner, Hans-Wolfram, Albert, Philipp, Wagner, Matthias, Barth, Sven
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9627566/ https://www.ncbi.nlm.nih.gov/pubmed/36260357 http://dx.doi.org/10.1021/acs.inorgchem.2c02835

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