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Miniaturized electromechanical devices with multi-vibration modes achieved by orderly stacked structure with piezoelectric strain units
Piezoelectric devices based on a variety of vibration modes are widely utilized in high-tech fields to make a conversion between mechanical and electrical energies. The excitation of single or coupled vibration modes of piezoelectric devices is mainly related to the structure and property of piezoel...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9630418/ https://www.ncbi.nlm.nih.gov/pubmed/36323672 http://dx.doi.org/10.1038/s41467-022-34231-7 |