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Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics
Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
International Union of Crystallography
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9641570/ https://www.ncbi.nlm.nih.gov/pubmed/36345746 http://dx.doi.org/10.1107/S160057752200916X |