Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging

This paper reports on an aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array for photoacoustic (PA) imaging, where the high-order resonance modes of the PMUT are utilized to improve imaging resolution. A flexural vibration mode (FVM) PMUT is fabricated and applied i...

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Detalles Bibliográficos
Autores principales: Cai, Junxiang, Wang, Yiyun, Jiang, Daohuai, Zhang, Songsong, Gu, Yuandong Alex, Lou, Liang, Gao, Fei, Wu, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9643525/
https://www.ncbi.nlm.nih.gov/pubmed/36389053
http://dx.doi.org/10.1038/s41378-022-00426-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9643525/
https://www.ncbi.nlm.nih.gov/pubmed/36389053
http://dx.doi.org/10.1038/s41378-022-00426-7

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