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Role of titanium and organic precursors in molecular layer deposition of “titanicone” hybrid materials
The development of hybrid inorganic–organic films with well-controlled properties is important for many applications. Molecular layer deposition (MLD) allows the deposition of these hybrid films using sequential, self-limiting reactions, similar to atomic layer deposition (ALD). In this paper, we us...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9644066/ https://www.ncbi.nlm.nih.gov/pubmed/36415852 http://dx.doi.org/10.3762/bjnano.13.103 |