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Skate, overtravel, and contact force of tilted triangular cantilevers for microcantilever-based MEMS probe technologies
Microfabricated chip-edge microcantilevers are commonly used as surface probes, e.g. in near-field microscopy. Such probes normally function in the low-deflection regime, where their behaviour is very well understood and documented. In contrast, when microcantilevers are used for applications such a...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9653427/ https://www.ncbi.nlm.nih.gov/pubmed/36371455 http://dx.doi.org/10.1038/s41598-022-23973-5 |