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Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors

This brief presents a wafer alignment algorithm with reduced sensor number that obtains the relative distance of the wafer center and the robot hand. By ‘reduced number’, in spite of smaller number of sensors than the conventional method, we mean an improved method which achieves the similar results...

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Detalles Bibliográficos
Autor principal: Kim, Hyungjong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9654537/
https://www.ncbi.nlm.nih.gov/pubmed/36366219
http://dx.doi.org/10.3390/s22218521