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Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors

This brief presents a wafer alignment algorithm with reduced sensor number that obtains the relative distance of the wafer center and the robot hand. By ‘reduced number’, in spite of smaller number of sensors than the conventional method, we mean an improved method which achieves the similar results...

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Autor principal: Kim, Hyungjong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9654537/
https://www.ncbi.nlm.nih.gov/pubmed/36366219
http://dx.doi.org/10.3390/s22218521
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author Kim, Hyungjong
author_facet Kim, Hyungjong
author_sort Kim, Hyungjong
collection PubMed
description This brief presents a wafer alignment algorithm with reduced sensor number that obtains the relative distance of the wafer center and the robot hand. By ‘reduced number’, in spite of smaller number of sensors than the conventional method, we mean an improved method which achieves the similar results to pre-existing algorithms. Indeed, it can be designed with only three sensor data, less than four sensors of the conventional algorithm. Thus, some advantages of the proposed alignment algorithm include that it can be designed with low cost and less computing power. The proposed alignment algorithm is applied to a transfer robot for coater/developer system in semiconductor processing for verifying the performance of the method. The performance of the proposed method is validated by both simulation and experimental results.
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spelling pubmed-96545372022-11-15 Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors Kim, Hyungjong Sensors (Basel) Communication This brief presents a wafer alignment algorithm with reduced sensor number that obtains the relative distance of the wafer center and the robot hand. By ‘reduced number’, in spite of smaller number of sensors than the conventional method, we mean an improved method which achieves the similar results to pre-existing algorithms. Indeed, it can be designed with only three sensor data, less than four sensors of the conventional algorithm. Thus, some advantages of the proposed alignment algorithm include that it can be designed with low cost and less computing power. The proposed alignment algorithm is applied to a transfer robot for coater/developer system in semiconductor processing for verifying the performance of the method. The performance of the proposed method is validated by both simulation and experimental results. MDPI 2022-11-05 /pmc/articles/PMC9654537/ /pubmed/36366219 http://dx.doi.org/10.3390/s22218521 Text en © 2022 by the author. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Kim, Hyungjong
Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title_full Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title_fullStr Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title_full_unstemmed Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title_short Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
title_sort wafer center alignment system of transfer robot based on reduced number of sensors
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9654537/
https://www.ncbi.nlm.nih.gov/pubmed/36366219
http://dx.doi.org/10.3390/s22218521
work_keys_str_mv AT kimhyungjong wafercenteralignmentsystemoftransferrobotbasedonreducednumberofsensors