Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film

In this paper, a flexible piezoelectric micromachined ultrasonic transducer (PMUT) based on Scandium (Sc)-doped Aluminum Nitride (AlN) film was designed and modeled by the three-dimensional finite element method (3D-FEM). The resonant frequency of 218.1 kHz was reported. It was noticeable that a hig...

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Detalles Bibliográficos
Autores principales: Ren, Qinghua, Chen, Junhong, Liu, Xin, Zhang, Songsong, Gu, Yuandong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9656918/
https://www.ncbi.nlm.nih.gov/pubmed/36365796
http://dx.doi.org/10.3390/s22218100

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9656918/
https://www.ncbi.nlm.nih.gov/pubmed/36365796
http://dx.doi.org/10.3390/s22218100

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