The Design, Fabrication and Characterization of Grating Couplers for SiGe Photonic Integration Employing a Reflective Back Mirror

We propose and demonstrate an efficient grating coupler for integrated SiGe photonic devices. A bottom metal layer is adopted to enhance the coupling efficiency on the wafer backside. A low coupling loss of −1.34 dB and −0.79 dB can be theoretically obtained with optimal parameters for uniform and a...

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Detalles Bibliográficos
Autores principales: Huang, Qiang, Zhang, Yi, Tang, Jie, Sun, Junqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9658239/
https://www.ncbi.nlm.nih.gov/pubmed/36364564
http://dx.doi.org/10.3390/nano12213789

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9658239/
https://www.ncbi.nlm.nih.gov/pubmed/36364564
http://dx.doi.org/10.3390/nano12213789

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