Impact of pre-annealing process on electrical properties and stability of indium zinc oxide thin-film transistors

This paper examined the effects of no treatment versus plasma treatment, and femtosecond laser irradiation as pre-annealing processes on indium zinc oxide (IZO) films and annealing at high temperatures. The plasma pre-annealed multilayer stacked IZO TFTs showed better electrical properties with mobi...

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Detalles Bibliográficos
Autores principales: Zhao, Han-Lin, Tarsoly, Gergely, Shan, Fei, Wang, Xiao-Lin, Lee, Jae-Yun, Jeong, Yong Jin, Kim, Sung-Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9663500/
https://www.ncbi.nlm.nih.gov/pubmed/36376427
http://dx.doi.org/10.1038/s41598-022-24093-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9663500/
https://www.ncbi.nlm.nih.gov/pubmed/36376427
http://dx.doi.org/10.1038/s41598-022-24093-w

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