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Adsorption Behaviors of Chlorosilanes, HCl, and H(2) on the Si(100) Surface: A First-Principles Study
[Image: see text] The hydrochlorination process is a necessary technological step for the production of polycrystalline silicon using the Siemens method. In this work, the adsorption behaviors of silicon tetrachloride (SiCl(4)), silicon dichloride (SiCl(2)), dichlorosilane (SiH(2)Cl(2)), trichlorosi...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9686198/ https://www.ncbi.nlm.nih.gov/pubmed/36440113 http://dx.doi.org/10.1021/acsomega.2c04502 |