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Adsorption Behaviors of Chlorosilanes, HCl, and H(2) on the Si(100) Surface: A First-Principles Study

[Image: see text] The hydrochlorination process is a necessary technological step for the production of polycrystalline silicon using the Siemens method. In this work, the adsorption behaviors of silicon tetrachloride (SiCl(4)), silicon dichloride (SiCl(2)), dichlorosilane (SiH(2)Cl(2)), trichlorosi...

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Detalles Bibliográficos
Autores principales:	Wang, Yajun, Nie, Zhifeng, Guo, Qijun, Song, Yumin, Liu, Li
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9686198/ https://www.ncbi.nlm.nih.gov/pubmed/36440113 http://dx.doi.org/10.1021/acsomega.2c04502

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