(Cr(1−x)Al(x))N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering

The paper deals with the (Cr(1−x)Al(x))N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnet...

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Detalles Bibliográficos
Autores principales: Grenadyorov, Alexander, Oskirko, Vladimir, Zakharov, Alexander, Oskomov, Konstantin, Solovyev, Andrey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692757/
https://www.ncbi.nlm.nih.gov/pubmed/36431721
http://dx.doi.org/10.3390/ma15228237

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692757/
https://www.ncbi.nlm.nih.gov/pubmed/36431721
http://dx.doi.org/10.3390/ma15228237

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