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(Cr(1−x)Al(x))N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering
The paper deals with the (Cr(1−x)Al(x))N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnet...
Autores principales: | Grenadyorov, Alexander, Oskirko, Vladimir, Zakharov, Alexander, Oskomov, Konstantin, Solovyev, Andrey |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692757/ https://www.ncbi.nlm.nih.gov/pubmed/36431721 http://dx.doi.org/10.3390/ma15228237 |
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