Impact of Various Thermistors on the Properties of Resistive Microbolometers Fabricated by CMOS Process

Microbolometers based on the CMOS process has the important advantage of being automatically merged with circuits in the fabrication of larger arrays, but they typically suffer from low detectivity due to the difficulty in realizing high-sensitivity thermistors in the CMOS process. In this paper, tw...

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Detalles Bibliográficos
Autores principales: Guo, Yaozu, Ma, Haolan, Lan, Jiang, Liao, Yiming, Ji, Xiaoli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9694645/
https://www.ncbi.nlm.nih.gov/pubmed/36363891
http://dx.doi.org/10.3390/mi13111869

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9694645/
https://www.ncbi.nlm.nih.gov/pubmed/36363891
http://dx.doi.org/10.3390/mi13111869

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