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Design of GHz Mechanical Nanoresonator with High Q-Factor Based on Optomechanical System

Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless com...

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Detalles Bibliográficos
Autores principales: Jin, Jun, Hu, Ningdong, Zhan, Lamin, Wang, Xiaohong, Zhang, Zenglei, Hu, Hongping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695023/
https://www.ncbi.nlm.nih.gov/pubmed/36363884
http://dx.doi.org/10.3390/mi13111862