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Design of GHz Mechanical Nanoresonator with High Q-Factor Based on Optomechanical System
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless com...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695023/ https://www.ncbi.nlm.nih.gov/pubmed/36363884 http://dx.doi.org/10.3390/mi13111862 |