Study of Defects and Nano-patterned Substrate Regulation Mechanism in AlN Epilayers

The high crystal quality and low dislocation densities of aluminum nitride (AlN) grown on flat and nano-patterned sapphire substrate that are synthesized by the metal-organic chemical vapor deposition (MOCVD) method are essential for the realization of high-efficiency deep ultraviolet light-emitting...

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Detalles Bibliográficos
Autores principales: Wei, Wenwang, Peng, Yi, Yang, Yanlian, Xiao, Kai, Maraj, Mudassar, Yang, Jia, Wang, Yukun, Sun, Wenhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695674/
https://www.ncbi.nlm.nih.gov/pubmed/36432223
http://dx.doi.org/10.3390/nano12223937

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695674/
https://www.ncbi.nlm.nih.gov/pubmed/36432223
http://dx.doi.org/10.3390/nano12223937

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