Glass-to-Glass Fusion Bonding Quality and Strength Evaluation with Time, Applied Force, and Heat

A bonding process was developed for glass-to-glass fusion bonding using Borofloat 33 wafers, resulting in high bonding yield and high flexural strength. The Borofloat 33 wafers went through a two-step process with a pre-bond and high-temperature bond in a furnace. The pre-bond process included surfa...

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Detalles Bibliográficos
Autores principales: Trinh, Nhi N., Simms, Leslie A., Chew, Bradley S., Weinstein, Alexander, La Saponara, Valeria, McCartney, Mitchell M., Kenyon, Nicholas J., Davis, Cristina E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695810/
https://www.ncbi.nlm.nih.gov/pubmed/36363914
http://dx.doi.org/10.3390/mi13111892

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695810/
https://www.ncbi.nlm.nih.gov/pubmed/36363914
http://dx.doi.org/10.3390/mi13111892

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