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Glass-to-Glass Fusion Bonding Quality and Strength Evaluation with Time, Applied Force, and Heat
A bonding process was developed for glass-to-glass fusion bonding using Borofloat 33 wafers, resulting in high bonding yield and high flexural strength. The Borofloat 33 wafers went through a two-step process with a pre-bond and high-temperature bond in a furnace. The pre-bond process included surfa...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695810/ https://www.ncbi.nlm.nih.gov/pubmed/36363914 http://dx.doi.org/10.3390/mi13111892 |