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A Piezoelectric MEMS Microgripper for Arbitrary XY Trajectory
In this paper, a piezoelectric microgripper for arbitrary 2D trajectory is proposed. The desired trajectory of the specimen under consideration was obtained by the deformability of a structure consisting of 16 straight beams and 12 C-structures. The mechanical action that deforms the structure was o...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9697840/ https://www.ncbi.nlm.nih.gov/pubmed/36363909 http://dx.doi.org/10.3390/mi13111888 |