Design and Performance of a Spatial 6-RRRR Compliant Parallel Nanopositioning Stage

Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs). This paper proposes a new NPS that uses PEAs and CPMs with multiple spatial DOFs. First, the design of the mechanism is...

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Detalles Bibliográficos
Autores principales: Wang, Ruizhou, Wu, Heng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9698181/
https://www.ncbi.nlm.nih.gov/pubmed/36363910
http://dx.doi.org/10.3390/mi13111889

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9698181/
https://www.ncbi.nlm.nih.gov/pubmed/36363910
http://dx.doi.org/10.3390/mi13111889

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