A Simple Method for the Measurement of Young’s Moduli of Bilayer Thin Films Based on the Electrostatic Drive Approach

This paper presents a simple method for the in situ determination of Young’s moduli of surface-micromachined bilayer thin films. The test structure consists of a cantilever, a bottom drive electrode located near the anchor, and a bottom contact electrode placed below the free end of the cantilever....

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Detalles Bibliográficos
Autores principales: Liu, Haiyun, Zhang, Zhen, Gao, Hongmin, Zhang, Lili, Wang, Lei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9698992/
https://www.ncbi.nlm.nih.gov/pubmed/36363963
http://dx.doi.org/10.3390/mi13111943

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9698992/
https://www.ncbi.nlm.nih.gov/pubmed/36363963
http://dx.doi.org/10.3390/mi13111943

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