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A Simple Method for the Measurement of Young’s Moduli of Bilayer Thin Films Based on the Electrostatic Drive Approach
This paper presents a simple method for the in situ determination of Young’s moduli of surface-micromachined bilayer thin films. The test structure consists of a cantilever, a bottom drive electrode located near the anchor, and a bottom contact electrode placed below the free end of the cantilever....
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9698992/ https://www.ncbi.nlm.nih.gov/pubmed/36363963 http://dx.doi.org/10.3390/mi13111943 |