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Study on Purification Technology of Silicon Carbide Crystal Growth Powder

Silicon carbide (SiC) is a wide-bandgap (WBG) semiconductor material, and its preparation process has strict requirements on the purity of raw materials. A self-developed medium-frequency induction heating furnace was used to carry out powder heat treatment and purification experiments on SiC powder...

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Detalles Bibliográficos
Autores principales: Fan, Guofeng, Li, Tie, Zhao, Lili, Zhang, Shengtao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9699396/
https://www.ncbi.nlm.nih.gov/pubmed/36431674
http://dx.doi.org/10.3390/ma15228190